Seminar on Scatterometry and Ellipsometry on Structured Surfaces

The Seminar on Scatterometry and Ellipsometry on Structured Surfaces, organized by PTB and SREvents, will beld in Braunschweig, Germany, from 18 - 19 March, 2009.

Topics

Topics include among others:

• Dimensional metrology on structured surfaces using scatterometry and related methods
• Applications in semiconductor industry and beyond
• Basic principles, modelling, methods

Venue

Physikalisch-Technische Bundesanstalt Braunschweig
Bundesallee 100
38116 Braunschweig

Organized by: PTB, Braunschweig with the support of SREvents, Braunschweig

More information is available at:  www.ptb.de/scatterometry

Contact

For scientific questions:
Dr. Bernd Bodermann
Physikalisch-Technische Bundesanstalt
Tel. +49 531 592  4222
bernd.bodermann@ptb.de

For organizational questions:
Sabine Rodriguez
SREvents
Tel. +49 531 6149807
Fax: +49 531 61499379
scatterometry@ptb.de