PhD position: Measurement of nanometer-sized features by electromagnetic scattering analysis.

Project and job description 

The research project is related to the measurement of the nanometer-sized features that are produced in the optical lithographic process steps during the production of the newest- and future-generation silicon devices. The measurement and control of the actual 45-nanometer features and the future smaller ones ask for fast and reliable optical methods that are based on the far-field measurement of the scattered light over a broad range of wavelengths. An inverse electromagnetic scattering model should allow the reconstruction of the scattering features with the required nanometer accuracy. The project focuses on both the theoretical and experimental aspects of the scattering problem and will start at the Optics Research Group in Delft. The set-up of the final on-line measurement method and the field tests will be carried out at the clean-room facilities of ASM Lithography in Veldhoven, The Netherlands.
The particular research described in this advertisement will be sponsored by ASM-Lithography, the world leader in optical lithographic equipment with a market share of 60% in wafer steppers for the Integrated-Circuit industry and employing some seven thousand persons worldwide.

Requirements

Applicants should have graduated in physics. Knowledge of geometrical and/or physical optics is recommended. Delft University of Technology is a bilingual organisation. A good command of English (written and spoken) is essential, while a good command of Dutch is also preferred.

Conditions of employment

The extent of this position is a maximum of 38 hours per week (1 FTE). This position has a temporary employment basis of 1 year (12 months). The estimated PhD starting salary is € 1,956 per month gross, with a maximum of € 2,502 gross (based on a full-time appointment and depending on experience). Benefits and other employment conditions are in accordance with the Collective Labour Agreement for Dutch Universities. The successful candidate will be employed by TU Delft for a fixed period of 4 years (48 months). Within nine months from the start of the PhD research, the appointee will present his or her proposal to a scientific committee. If the proposal is approved, the appointment will be extended for another three years within which he/she is expected to write a dissertation leading to the Dr title (PhD thesis). With regard to selection, internal candidates take precedence over external candidates. TU Delft strives to increase the number of women in higher academic positions; women are thus especially encouraged to apply.

Information and application

For further details on the position you are welcome to contact Prof. H.P. Urbach, phone: +31 (0) 15 – 27 86146 or: +31 (0)15 – 27 81444, e-mail: h.p.urbach at tudelft.nl
To apply, please send a detailed CV together with a letter of motivation to Delft University of Technology, Faculty of Applied Sciences, attn. Prof. H.P. Urbach, Lorentzweg 1, 2628 CJ Delft, The Netherlands; or apply online to: h.p.urbach  at tudelft.nl.